中图分类号：TH711；TB9 文献标识码：A

doi:10.37188/OPE.20263415.2369 CSTR:32169.14.OPE.20263415.2369

Capacitive 3D nanoscale measurement probe

HUANG Qiangxian, ZHANG Xingyue, HAO Weining, ZHAO Zhiha（试读）...